Cleaning
Remove organic residue before bonding, coating, or analysis.
O2 / N2 / Ar1 W power precision
Compact RF Plasma Cleaner
PLUTO-T Compact RF Plasma Cleaner
A compact 200 W RF plasma cleaner for single-sample cleaning, surface activation, and small-lab entry into plasma processing.
Chamber
~4.3 L
RF Power
200 W
Frequency
13.56 MHz
Control
Touchscreen
Single-Sample Plasma Processing
High power density RF cleaning in a benchtop footprint.
PLUTO-T pairs a 200 W RF source with a compact ~4.3L stainless steel chamber, giving small labs precise, repeatable plasma cleaning without a full-size system.
Activation
Raise surface energy for adhesion, wetting, and PDMS bonding.
PolymersGlassMetals
Small-Lab Entry
Touchscreen automation makes plasma processing approachable for new users.
Fully automated runsBenchtop format
Use Cases
Built for compact single-sample plasma workflows.
Sample Cleaning
Prepare individual substrates and samples with adjustable 0-200 W RF power.
Surface Activation
Activate surfaces before bonding, coating, or microfluidic assembly.
Teaching and Prototyping
A compact automated platform for teaching labs and early process development.
Specifications
PLUTO-T configuration window
Representative PLUTO-T configuration from the equipment summary and legacy datasheet table. Confirm process-specific requirements during quote review.
- Chamber
- ~4.3 L stainless steel
- Chamber Size
- φ150 mm x 245 mm depth
- RF Power
- 0-200 W, 1 W precision
- Frequency
- 13.56 MHz, auto-impedance matching
- Electrode
- 95 x 170 mm flat plate
- Gas Lines
- 1 standard, optional 2nd (O2 / N2 / Ar)
- Control
- 4.3 in touchscreen, fully automated
- System Size
- 380 x 500 x 490 mm
Applications
Where PLUTO-T fits
Single-sample cleaning
Surface activation
PDMS and microfluidic bonding
SEM sample preparation
Teaching labs
Process prototyping
System Views
System Views
Use these actual system photos to review the chamber interior, electrode format, sample handling, and benchtop footprint before configuration review.
Resources
Related Resources
FAQ
Frequently Asked Questions
How is PLUTO-T different from HY-4L?
PLUTO-T is an RF-only 200 W compact cleaner with 1 W power precision and touchscreen automation, sized for single-sample workflows. HY-4L offers RF or mid-frequency options in a 4L chamber format. See the PLUTO vs HY comparison guide for a full breakdown.
Can PLUTO-T be purchased directly?
Yes. PLUTO-T can be ordered directly, and institutional buyers can also request a budgetary quote for PO-based purchasing.
Ready to Configure
Choose PLUTO-T for compact RF plasma processing.
Order directly or request a budgetary quote for institutional purchasing.