Batch Cleaning
Process multi-sample batches in a ~8L stainless steel chamber.
~2x PLUTO-T capacity2 gas lines standard
Mid-Capacity RF Plasma Cleaner
PLUTO-M Mid-Capacity RF Plasma Cleaner
An ~8L RF plasma cleaner with gas-shower electrode and recipe storage for multi-sample batches, polymer treatment, and surface activation.
Chamber
~8 L
RF Power
200 W
Gas Lines
2
Recipes
Stored
Batch Plasma Processing
Multi-sample RF cleaning with recipe repeatability.
PLUTO-M pairs a 200 W RF source with an ~8L chamber and perforated gas-shower electrode, so batches see uniform plasma while stored recipes keep every run consistent.
Uniform Activation
The gas-shower electrode distributes process gas evenly across samples.
O2 / N2 / Ar1 W power precision
Recipe Storage
Store validated recipes on the touchscreen for repeatable shared-lab use.
Fully automated runsMulti-user workflows
Use Cases
Built for mid-capacity batch plasma workflows.
Multi-Sample Preparation
Efficient batch preparation for characterization and analysis workflows.
Polymer Treatment
Surface modification for adhesion and biocompatibility across sample batches.
Photoresist Ashing
Uniform RF processing for complete resist removal.
Specifications
PLUTO-M configuration window
Representative PLUTO-M configuration from the equipment summary and legacy datasheet table. Confirm process-specific requirements during quote review.
- Chamber
- ~8 L stainless steel
- Chamber Size
- φ210 mm x 230 mm
- RF Power
- 0-200 W, 1 W precision
- Frequency
- 13.56 MHz, auto-impedance matching
- Electrode
- 125 x 125 mm perforated gas-shower plate
- Gas Lines
- 2 lines, 6 mm connectors (O2 / N2 / Ar)
- Vacuum
- VRD-4 two-stage oil pump, 4 m3/h
- Control
- 4.3 in touchscreen with recipe storage
- System Size
- 405 x 610 x 670 mm
Applications
Where PLUTO-M fits
Multi-sample batch cleaning
Surface activation
Polymer and plastics treatment
Surface preparation
SEM sample preparation
Core facility workflows
System Views
System Views
Use these actual system photos to review the ~8L chamber, gas-shower electrode, and complete vacuum system before configuration review.
Resources
Related Resources
FAQ
Frequently Asked Questions
How is PLUTO-M different from PLUTO-T?
PLUTO-M doubles the chamber volume to ~8L for multi-sample batches, adds a second gas line as standard, uses a perforated gas-shower electrode for uniform distribution, and stores recipes on the touchscreen for repeatable runs. PLUTO-T is the compact single-sample entry point.
Can PLUTO-M be purchased directly?
Yes. PLUTO-M can be ordered directly, and institutional buyers can also request a budgetary quote for PO-based purchasing.
Ready to Configure
Choose PLUTO-M for repeatable batch plasma processing.
Order directly or request a budgetary quote for institutional purchasing.