Batch Cleaning
Process multi-sample batches in a ~8L stainless steel chamber.
~2x PLUTO-T capacity2 gas lines standard
Mid-Capacity RF Plasma Cleaner
PLUTO-M Mid-Capacity RF Plasma Cleaner
An ~8L RF plasma cleaner with gas-shower electrode and an included two-stage vacuum pump for multi-sample batches, polymer treatment, and surface activation.
Configuration
$12,999
RF (13.56 MHz) configuration
Chamber
~8 L
RF Power
200 W
Gas Lines
2
Pump
Two-stage
Batch Plasma Processing
Multi-sample RF cleaning with a gas-shower electrode.
PLUTO-M pairs a 200 W RF source with an ~8L chamber and a 125 x 125 mm perforated gas-shower plate, which admits process gas through the electrode face rather than a side inlet.
Gas-Shower Electrode
Process gas enters through the perforated electrode face rather than a side inlet.
O2 / N2 / Ar1 W power precision
Included Vacuum
The two-stage rotary pump ships with the system rather than as an option.
VRD-4, 4 m3/hFully automated runs
Use Cases
Built for mid-capacity batch plasma workflows.
Multi-Sample Preparation
Efficient batch preparation for characterization and analysis workflows.
Polymer Treatment
Surface modification for adhesion and biocompatibility across sample batches.
Photoresist Ashing
Oxygen plasma ashing at 0-200 W, adjustable in 1 W steps.
Specifications
PLUTO-M configuration window
Representative PLUTO-M configuration from the equipment summary and legacy datasheet table. Confirm process-specific requirements during quote review.
- Chamber
- ~8 L stainless steel
- Chamber Size
- φ210 mm x 230 mm
- RF Power
- 0-200 W, 1 W precision
- Frequency
- 13.56 MHz, auto-impedance matching
- Electrode
- 125 x 125 mm perforated gas-shower plate
- Gas Lines
- 2 lines, 6 mm connectors (O2 / N2 / Ar)
- Vacuum
- VRD-4 two-stage oil pump, 4 m3/h
- Vacuum Gauge
- Thermocouple, 0-100 kPa
- Control
- 4.3 in touchscreen, multi-level menu
- System Size
- 405 x 670 x 610 mm (W x D x H)
- Electrical
- 208–240 VAC, single-phase, 60 Hz
Applications
Where PLUTO-M fits
Multi-sample batch cleaning
Surface activation
Polymer and plastics treatment
Surface preparation
SEM sample preparation
Core facility workflows
Research evidence
Peer-reviewed research
Published work using the plasma cleaner platform we represent · 1 paper
- View source
Transformable nano-antibiotics for mechanotherapy and immune activation against drug-resistant Gram-negative bacteria
Science Advances 2023
System Views
System Views
Use these actual system photos to review the ~8L chamber, gas-shower electrode, and complete vacuum system before configuration review.
FAQ
Frequently Asked Questions
How is PLUTO-M different from PLUTO-T?
PLUTO-M doubles the chamber volume to ~8L for multi-sample batches, adds a second gas line as standard, uses a perforated gas-shower electrode in place of a solid plate, and includes the two-stage vacuum pump that is an option on PLUTO-T. PLUTO-T is the compact single-sample entry point.
Can PLUTO-M be purchased directly?
Yes. PLUTO-M can be ordered directly, and institutional buyers can also request a budgetary quote for PO-based purchasing.
Ready to Configure
Choose PLUTO-M for repeatable batch plasma processing.
Order directly or request a budgetary quote for institutional purchasing.